Analysis and experimental results of high temperature stable surface acoustic wave substrate of SiO{sub}2/LiNbO{sub}3 structure with super high coupling

摘要

In this paper, in order to improve the TCF the propagation characteristics of SiO{sub}2/Rotated Y-cut, X-propagating LiNbO{sub}3 leaky SAW substrates with a large k{sup}2 (Electromechanical coupling) and zero TCF (Temperature coefficient of frequency) are theoretically investigated. The results showed a large k{sup}2 of leaky SAW over 0.2 (zero k{sup}2 of Rayleigh mode), zero TCF and zero propagation attenuation in the case of metallized surface at thin film thickness of H/λ = 0.15～0.25 ( H: SiO{sub}2 film thickness, λ:SAW wavelength) were obtained. The theoretical and experimental results will be described.