X射线反射镜缺陷和超光滑表面粗糙度的空间分布的测定

摘要

In the X-ray region, the reflection efficiency ofa superpolished surface strongly depends on its roughness.This effect may be used to obtain a two-dimensional map ofthe roughness spatial distribution for flat surfaces with a realmean square roughness height of the order of one nanometer.The basic components of such a device are a precisionmechanical one-dimensional scanning stage and atemperature stabilized cooled X-ray linear detector array withquantum efficiency at CuKα radiation.