Application of thin diamond films in low-coherence fiber-optic Fabry Perot displacement sensor

摘要

The novel fiber-optic low coherence sensor with thin diamond films is demonstrated. The undoped and boron doped diamond films were elaborated by the use of the microwave plasma enhanced chemical vapor deposition (mu PE CVD) system. The optical signal from the Fabry-Perot cavity made with the application of those thin films is sensitive to displacement. The sensor characterization was made in the range of 0-600 mu m. The measurements were performed using two superluminescent diodes (SLD) with central wavelengths of 1290 mm and 1550 mm and the output signal was analyzed by the measurement of the modulation change of spectral pattern. Furthermore, very good coefficient of the determination R-2 > 0.9565 and the visibility of optical measured signal equal to 95.6% were achieved. (C) 2016 The Authors. Published by Elsevier B.V.