Comparison of the structural and corrosion properties of the graphene/SiN(200) coating system deposited on titanium alloy surfaces covered with SiN transition layers

摘要

In this paper, comparative studies of the structural and corrosion properties of SiN/graphene/SiN coating systems with various SiN transition layer thickness have been investigated. The coating systems were formed on Ti6Al4V alloy surfaces. The SiN transition layer thicknesses varied from 100 nm to 300 nm. The thickness of the upper silicon nitride thin film, in all examined cases, was 200 nm. The silicon nitride thin film was deposited using the Plasma Enhanced Chemical Vapour Deposition method.