首页> 外文期刊>The journal of physical chemistry, B. Condensed matter, materials, surfaces, interfaces & biophysical >Structure,Composition,and Morphology of Photoelectrochemically Active TiO_(2-x)N_x Thin Films Deposited by Reactive DC Magnetron Sputtering
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Structure,Composition,and Morphology of Photoelectrochemically Active TiO_(2-x)N_x Thin Films Deposited by Reactive DC Magnetron Sputtering

机译:直流磁控溅射沉积光电化学活性TiO_(2-x)N_x薄膜的结构,组成和形貌

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摘要

Films of nitrogen-doped TiO_2 were made by reactive DC magnetron sputtering in a mixture of argon,oxygen,and nitrogen.The nitrogen gas ratio PHI was varied in the 0
机译:在氩,氧,氮混合气体中,通过反应直流磁控溅射制备了氮掺杂的TiO_2薄膜。沉积过程中氮气比率PHI在0

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