Subnanometer absolute displacement measurement using a frequency comb referenced dual resonance tracking Fabry-Perot interferometer

摘要

Fabry - Perot (F-P) interferometry is a traceable high-resolution method for displacement metrology that has no nonlinearity. Compared with the single resonance tracking F-P interferometry, the dual resonance tracking ( DRT) F-P interferometer system is able to realize tens of millimeters measurement range while maintaining the intrinsic high resolution. A DRT F-P system is thus developed for absolute displacement measurement in metrology applications. Two external cavity diode lasers (ECDLs) are simultaneously locked to two resonances of a high-finesse F-P cavity using the Pound -Drever - Hall locking scheme. The absolute optical frequencies of the locked ECDLs are measured using a reference diode laser, with the frequency stabilized and controlled by an optical frequency comb. The absolute cavity resonance order numbers are investigated. The measurement range is experimentally tested to achieve 20 mm, while the resolution reaches similar to 10 pm level, mainly limited by the mechanical stability of the F-P cavity. Compared with the measurement results from a self-developed displacement-angle heterodyne interferometer, the displacement residuals are within 10 nm in the range of 20 mm. This high-resolution interferometer may become a candidate for length metrology such as in Watt balance or Joule balance projects. (C) 2015 Optical Society of America