Surfaces of martensite 12Cr-2Mo-Mn steel andtitanium alloy VT-18U were irradiated with 40 keV N+ ions andnitrogen plasma flow. It was shown that preliminary 30 keVN2+ ion implantation and subsequent plasma treatment increaseof nitrogen penetration in the materials more then an order ofmagnitude compared to theoretical ion range, the microhardnessbeing increased in 3 and 1.8 times for steel and titanium alloycorrespondingly. A X-ray amorphous layer near the steel surfaceis formed as a result of implantation-plasma treatment. Intitanium alloy δ-phase of TiN was observed. Deep penetrationof nitrogen atoms is explained by their repulsive interaction,which results to appearance of the force acting on the atoms anddirected toward the deep in. This interaction is effective at high(>1 at.%) concentration of implanted atoms.
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机译：马氏体12Cr-2Mo-Mn钢和钛合金VT-18U的表面被40 keV N +离子辐照，并经过氮气等离子流照射。结果表明，与理论离子范围相比，初步的30 keVN2 +离子注入和随后的等离子体处理使材料中氮的渗透率增加了一个数量级，钢和钛合金的显微硬度分别提高了3倍和1.8倍。通过注入等离子体处理，在钢表面附近形成X射线无定形层。观察到TiN的钛合金δ相。氮原子的深层渗透是通过其排斥相互作用来解释的，这种排斥相互作用导致作用在原子上并指向深处的力的出现。这种相互作用在注入原子的浓度高（> 1 at。％）时有效。
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