Micro Electro-mechanical Systems Testing and Failure-analysis Challenges

摘要

MEMS are being seen as one of the most promising emerging tech-nologies to advance the development of next generation wireless devices.. MEWS promises to shrink devices, lower power requirements and, most importantly, enable new and cutting-edge applications. Although MEMS (Micro Electro-Mechanical Systems) have been around for a number of years, only recently has the technology started to hit the mainstream. Within the last five years, the rate of diversification of MEMS has increased notably into areas such as sensors and actuators, optical switches and reflectors, microflu-idics and, of course, RF.