Measured Viscous and Dry Friction Forces in Nanometer-Thick Lubricant Film by Friction Force Microscopy with Micromechanical Probe

摘要

A new method for measuring the contribution of the local viscous and dry friction forces on the micrometer scale is described. The velocity dependence of the local friction force is obtained using a dual-axis micromechanical probe with an electrostatic actuator. It is used to obtain the local damping coefficient and dry friction force of nm-thick lubricant films patterned on the micrometer scale. This method is useful for clarifying the mechanism of thin-film-based and boundary lubrications.