Dielectric properties of anodic oxide film on Nb solid solution/Nb_2N two phase alloys

摘要

The structure and dielectric properties of an anodic oxide on Nb solid solution (Nb_(ss))/Nb_2N two phase alloys were investigated. The anodized specimens were covered with two types of anodic oxides on the Nb_(ss) and Nb_2N phases, respectively. The relative permittivity and leakage current density of the anodized specimens can be explained by the combination of the two oxides; the relative permittivity of the specimens increased with the volume fraction of the oxide on the Nb_(ss) phase, because the relative permittivity of the oxide on the Nb_(ss) phase is higher than that on the Nb_2N phase. The leakage current was suppressed irrespective of the constitute phases as compared with the anodized pure Nb, because it was reduced in both the oxides on the Nb_(ss) and Nb_2N phases.