Method cuts MEMS inspection times

摘要

A team of European researchers has developed a way to test hundreds of MEMS structures at once to reduce inspection time from 20 minutes to less than 30 seconds.rnPresently MEMS, or Micro-Electro Mechanical Systems, must be tested one at a time, which is a time-consuming and expensive process.rnThe EU's SMARTIEHS (SMART InspEction systems for High Speed and multifunctional testing of MEMS and MOEMS) project is developing a better and cheaper testing method for industry.