Desktop SEMs produce fast images

摘要

The push to reduce the size of inspection systems for increased portability and flexibility has led to the development of desktop machines based on technologies such as AOI (automated optical inspection) and AXI (automated x-ray inspection) as well as on SEMs (scanning electron microscopes). Many of these smaller systems are used for offline, rather than inline, inspection tasks. In SEMs, electrons image a sample to distinguish characteristics on a much smallerrnscale than is possible with optical microscope techniques. Since this process must occur in a vacuum, most desktop SEM applications are by necessity restricted to offline inspection, said Phenom-World's Jack McFarland, GM for North America.