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首页> 外文期刊>IEEE sensors journal >Diamond Detector With Laser-Formed Buried Graphitic Electrodes: Micron-Scale Mapping of Stress and Charge Collection Efficiency
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Diamond Detector With Laser-Formed Buried Graphitic Electrodes: Micron-Scale Mapping of Stress and Charge Collection Efficiency

机译:金刚石探测器具有激光形成的掩埋石墨电极:压力和充电效率的微米级映射

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摘要

The paper reports the micron-scale investigation of an all-carbon detector based on synthetic single crystal CVD-diamond having an array of cylindrical graphitic buried-contacts, about 20 mu m in diameter each, connected at the front side by superficial graphitic strips. To induce diamond-to-graphite transformation on both detector surface and bulk volume, direct-laser-writing technique was used. Laser-treatment parameters and cell shape have been chosen to minimize the overlapping of laser-induced stressed volumes. Optical microscopy with crossed polarizers highlighted the presence of an optical anisotropy of the treated material surrounding the embedded graphitized columns, and non-uniform stress in the buried zones being confirmed with a confocal Raman spectroscopy mapping. Dark current-voltage characterization highlights the presence of a field-assisted detrapping transport mainly related to highly-stresses regions surrounding buried columns, as well as superficial graphitized strips edges, where electric field strength is more intense, too. Notwithstanding the strain and electronic-active defects, the detector demonstrated a good charge collection produced by 3.0 and 4.5 MeV protons impinging the diamond, as well as those generated by MeV beta-particles emitted by Sr-90 source. Indeed, the mapping of charge collection efficiency with Ion Beam Induced Charge technique displayed that only a few micrometers thick radial region surrounding graphitic electrodes has a reduced efficiency, while most of the device volume preserves good detection properties with a charge collection efficiency around 90% at 60 V of biasing. Moreover, a charge collection efficiency of 96% was estimated under MeV electrons irradiation, indicating the good detection activity along the buried columns depth.
机译:本文报告了基于合成单晶CVD-金刚石的全碳检测器的微米级研究,其具有圆柱形石墨掩埋触点的阵列,每个直径为约20μm,通过浅表石墨条连接在前侧。为了在探测器表面和散装体积上诱导菱形到石墨变换,使用直激来写入技术。已经选择激光处理参数和细胞形状以最小化激光诱导的应力体积的重叠。具有交叉偏振器的光学显微镜突出显示围绕嵌入的石墨柱围绕的处理材料的光学各向异性,并用共焦拉曼光谱法测定掩埋区域的不均匀应力。暗电流 - 电压表征突出了现场辅助剥离传输的存在主要与掩埋柱周围的高度应力区域,以及浅表石墨化的条带边缘,电场强度也更加强烈。尽管存在应变和电子有缺陷,但探测器展示了撞击金刚石的3.0和4.5meV质子产生的良好电荷收集,以及由SR-90源发出的MEVβ颗粒产生的那些。实际上,利用离子束感应电荷技术的电荷收集效率的映射,显示了围绕石墨电极的几微米厚的径向区域具有降低的效率,而大多数器件容积保持良好的检测性能,电荷收集效率为90%。 60 v的偏见。此外,在MEV电子照射下估计了96%的电荷收集效率,表明沿着掩埋柱深度的良好检测活动。

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