An Analytical Solution to Circular Touch Mode Capacitor

摘要

In this paper, a simple but accurate analytical solution is presented to model the flexion of a circular diaphragm with clamped edges under an uniform load. The touch down effect and the evolution of touch radius are considered in this model, making it useful for touch down capacitor devices such as pressure sensors. This model is then compared to results obtained from Coventor, a finite elements analysis program designed for microelectromechanical systems