Erratum to: 'A differential microcantilever-based system for measuring surface stress changes induced by electrochemical reactions' [Sensors and Actuators B 107 (2005) 233-241]

摘要

Eq. (2) was derived under the false assumption that for a small deflection angle, θ, the curvature of the cantilever can be approximated by a line. We provide below the correct derivation for the geometrical calibration formula, relating the output of the position sensing photodetector (PSD) to the microcantilever deflection, taking into account the curvature of the cantilever beam.