Tungsten trioxide sensing layers on highly ordered nanoporous alumina template

摘要

The gas sensing properties of WO_3 thin films deposited on highly ordered nanoporous alumina templates were studied. WO_3 films were prepared by rf sputtering of a tungsten target in a mixture of Ar and O_2. The WO_3-based sensors were selective to NO_2, NH_3 and ethanol at the temperature range from 150 to 300℃. A mechanism of the influence of the nanoporous template on the response of the sensing film is discussed.