Langasite based surface acoustic wave sensors for high temperature chemical detection in harsh environment: Design of the transducers and packaging

摘要

Universite de Bordeaux - Laboratoire IMS-ENSEIRB - CNRS UMR 5218, F-33405 Talence Cedex, France; Universite de Bordeaux - Laboratoire IMS-ENSEIRB - CNRS UMR 5218, F-33405 Talence Cedex, France; Universite de Bordeaux - Laboratoire IMS-ENSEIRB - CNRS UMR 5218, F-33405 Talence Cedex, France; Universite de Bordeaux - Laboratoire IMS-ENSEIRB - CNRS UMR 5218, F-33405 Talence Cedex, France; LMS - CNRS TOULOUSE, 7 avenue du Colonel Roche. F-31077, Toulouse, France; LMS - CNRS TOULOUSE, 7 avenue du Colonel Roche. F-31077, Toulouse, France; Universite de Bordeaux - Laboratoire IMS-ENSEIRB - CNRS UMR 5218, F-33405 Talence Cedex, France; Universite de Bordeaux - Laboratoire IMS-ENSEIRB - CNRS UMR 5218, F-33405 Talence Cedex, France;%This work presents the design and the thermal behavior characterization of an innovative self-test portable surface acoustic wave platform for chemical detection under high temperature. Before the forthcoming deposition of the sensitive coating, the thermal behavior of the bare LGS acoustic platform has been focused on. The system includes a (0', 140°, 25°) crystallographic cut langasite (LGS) piezoelectric substrate, a ceramic heater, and a platform with RF connections for remote measurements.The packaging consists in a hermetic stainless steel cell, which enables safe gas detection. Its thermal behavior was successfully investigated in the temperature range 25-500 ℃ thanks to the integrated heater, without using an external furnace. Finite element modeling aided the development of this platform structure by predicting the thermal behavior of each of its parts and their cross-influences. The structure of the platform was specifically designed so that 500 C could be reached on the LGS acoustic device while the temperature on the PCB connections should not exceed 50 ℃. Then, the temperature-dependence on the waves generated by the acoustic transducers has been investigated through numerical modeling by resolving the wave propagation equations with several sets of LGS constants. Corresponding simulations showed good agreement with experiments, Thermal cycling up to 350℃ highlighted satisfactory hardiness and response-reproducibility of the system towards thermal stress, after a first burn effect.