Micromachined catalytic combustible hydrogen gas sensor

摘要

An integrated catalytic combustion H_2 sensor has been fabricated by using MEMS technology. Both the sensing elements and the reference elements could be integrated into the suspended micro heaters connected in a suitable circuit such as a Wheatstone configuration with low power consumption. Two sensitive elements and two reference sensors were integrated together onto a single chip. The size of chip was 5.76 mm~2 and the catalytic combustion sensor showed high response to H_2 at operating voltage of 1 V. The response and recovery times to 1000 ppm H_2 were 0.36 s and 1.29 s, respectively.