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Design and electrochemical preparation of inductive copper coils for magnetic particles detection

机译:磁性粒子检测用感应铜线圈的设计与电化学制备

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摘要

New devices based on inductive planar coils have been designed in a manner that they can be used for the detection of magnetic particles in biodetection applications from the changes induced in coil inductance mounted in simple resonance differential filter circuit configurations. By simulating the conditions needed to achieve minimum electrical resistance and maximum sensibility, the planar coil design has been developed. The number of tracks and aspect ratio has been optimized for different theoretical track thicknesses. Using the optimized mask, electrodeposition was used to prepare coils of around 15-μm thick, with good edge definition and low electrical resistance, matching with the optimum simulated values. The resonant frequency of the fabricated coils measured using an impedance analyzer is identical for each coil type. Preliminary tests of the sensing ability of the coils were performed, revealing a change in the resonant frequency when a magnetic powder is present over the coil.
机译:已经设计了一种基于电感性平面线圈的新设备,该设备可以根据在简单谐振差分滤波器电路配置中安装的线圈电感引起的变化,用于生物检测应用中的磁粉检测。通过模拟实现最小电阻和最大灵敏度所需的条件,开发了平面线圈设计。轨道的数量和纵横比已针对不同的理论轨道厚度进行了优化。使用优化的掩模,电沉积可用于制备厚度约15μm的线圈,具有良好的边缘清晰度和低电阻,并与最佳仿真值匹配。对于每种线圈类型,使用阻抗分析仪测量的已制成线圈的谐振频率均相同。进行了线圈感应能力的初步测试,揭示了当线圈上存在磁性粉末时谐振频率的变化。

著录项

  • 来源
    《Sensors and Actuators》 |2012年第2012期|p.737-744|共8页
  • 作者单位

    Electrodep, Departament de Quimica Fisica and Institut de Nanociencia i Nanotecnologia (IN~2UB), Universitat de Barcelona. Marti i Franquis, 1,08028 Barcelona. Spain;

    Institut de Microelectronica de Barcelona (IMB-CNM), CS/C, Campus Universitat Autdnoma de Barcelona, 08193 Barcelona. Spain;

    EME/CERMAE. Departament d'Electrbnka and Institut de Nanociencia i Nanotecnologia (IN~2UB), Universitat de Barcelona, Marti i Franquts, 1,08028 Barcelona. Spain;

    Electrodep, Departament de Quimica Fisica and Institut de Nanociencia i Nanotecnologia (IN~2UB), Universitat de Barcelona. Marti i Franquis, 1,08028 Barcelona. Spain;

    EME/CERMAE. Departament d'Electrbnka and Institut de Nanociencia i Nanotecnologia (IN~2UB), Universitat de Barcelona, Marti i Franquts, 1,08028 Barcelona. Spain;

    Electrodep, Departament de Quimica Fisica and Institut de Nanociencia i Nanotecnologia (IN~2UB), Universitat de Barcelona. Marti i Franquis, 1,08028 Barcelona. Spain;

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  • 原文格式 PDF
  • 正文语种 eng
  • 中图分类
  • 关键词

    RLC circuit; coil devices; electrodeposition; inductive sensors;

    机译:RLC电路;线圈装置;电沉积感应式传感器;

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