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Improved speed of hydrogen detection by Schottky diodes on InP with electrophoretically deposited Pt nanoparticles and graphite contacts

机译:电泳沉积的Pt纳米颗粒和石墨触点提高了InP上肖特基二极管检测氢的速度

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The electrophoretic deposition (EPD) of nanoparticles (NPs) of the catalytic metal platinum (Pt) onto semiconductor wafers of indium phosphide (InP) from colloid solution in isooctane was studied at room temperature. The colloid solution for EPD was prepared by the chemical reduction of water solutions of the metal salts, confined to AOT reverse micelles in isooctane with hydrazine reducing agent. Four EPD-cast samples of Pt NPs were prepared on polished n-type InP wafers with varying times of deposition. The sheet density of Pt NPs varied from approximately 10% coverage of the substrate to 100% coverage of the substrate by several monolayers of Pt NPs, as observed by SEM. EPD was performed on a masked surface, enabling to make separated small deposited spots. Schottky contacts were made on the deposited spots by printing the contacts with colloidal graphite. The time response of the current to a 0.1% hydrogen exposure exhibited a continuous increase of saturation current and a decrease of the response time with increasing Pt NPs sheet density. Layers of Pt NPs were also prepared on p-type InP wafers. The current of the p-type InP diodes was observed to decrease with the exposure to hydrogen; its decrease was much smaller than the increase of current in n-type InP diodes. This demonstrates that two mechanisms are involved in formation of the hydrogen dipole layer. We have suggested the increase in hydrogen affinity by correlation effects as the second mechanism added to the well known hydrogen polarization by the electric field of the Schottky barrier.
机译:在室温下,研究了催化金属铂(Pt)的纳米颗粒(NPs)从胶体溶液在异辛烷中的电泳沉积到磷化铟(InP)半导体晶片上的电泳(EPD)。 EPD的胶体溶液是通过用肼还原剂化学还原金属盐水溶液而制得的,该金属盐水溶液被限制在异辛烷中的AOT反胶团中。在不同沉积时间的抛光n型InP晶圆上制备了四个Pt NP的EPD浇铸样品。通过SEM观察,Pt NP的薄层密度从几个衬底的Pt NP的大约10%覆盖到100%的衬底覆盖。 EPD是在遮盖的表面上进行的,因此可以形成分离的小沉积点。通过用胶体石墨印刷接触,在沉积的斑点上形成肖特基接触。电流对0.1%氢气暴露的时间响应显示出随着Pt NPs片密度的增加,饱和电流不断增加,响应时间减少。在p型InP晶圆上也准备了Pt NP层。观察到p型InP二极管的电流随着暴露于氢而降低;它的减小远小于n型InP二极管中电流的增大。这表明氢偶极层的形成涉及两种机理。我们已经提出通过相关效应增加氢亲和力,这是由于肖特基势垒电场增加了众所周知的氢极化的第二种机理。

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