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Analysis and optimization of the annealing mechanisms in (In)GaAsN on GaAs

机译:GaAs上(In)GaAsN退火机理的分析与优化

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摘要

We demonstrate the use of an ultra short annealing time to minimize the overall blueshift of the photoluminescence peak emission in (In)GaAsN during rapid thermal annealing (RTA). For the first time, the redshift component has been identified as a contributor in compensating the blueshift component. In doing so, we optimize the annealing conditions in dilute nitride and also identify the dominant mechanisms via the different PL behaviour exhibited by layers of InGaAs, GaAsN and InGaAsN embedded in GaAs as the annealing temperature is varied from 650 to 850 degrees C for t = 20 s.
机译:我们演示了使用超短退火时间来最小化快速热退火(RTA)期间(In)GaAsN中光致发光峰发射的总体蓝移。首次将红移分量识别为补偿蓝移分量的贡献者。为此,我们优化了稀氮化物中的退火条件,并通过退火温度从650到850摄氏度变化t =时,嵌入在GaAs中的InGaAs,GaAsN和InGaAsN层表现出的不同PL行为,确定了主要的机理。 20秒

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