Automation Needs Reach New Leves

摘要

Automation in state-of-the-art fabs will be used not only with each tool, but in transferring wafers from tool to tool. Every aspect of processing will include automation, from work-in-process (WIP) tracking to recipe management to process control and scheduling. Fabs continue to require more decision support from computer integrated manufacturing (CIM) systems. Overall worldwide guidance and SEMI specifications have been defined to allow these automation features to be implemented on an industry common basis. The authors discuss techniques, tools and requirements for meeting these challenges.