Torque Elimination Fittings Add to Gas Handling Safety

摘要

Applied Materials' flagship 300 mm system and process development facility is the Dan May-dan Process Module Technology Center (PMTC, Sunnyvale, Calif.). This facility contains the equipment and processes needed for Applied Materials' customers to develop and pre-test integrated multi-level metal copper interconnect process modules before delivery to their fabs. The design of this center required the company to look forward to envision the facility requirements for cutting-edge process development 10 years in the future. At the current rate of evolution in the semiconductor industry, this represents about six chip generations.