The Next Step in E-diagnostics: Mining the Tool Sensors

摘要

Mature e-diagnostics capabilities have been combined with proven enterprise data mining technology to pinpoint the specific critical process conditions and variables that affect process control. Sensor Data Mining combines fab-level data (particles, defects, metrology, e-test, yield and others) with e-diagnostics, and tool-based sensor data to identify significant correlations among all variable combinations. This combination of technologies can provide a comprehensive prioritized listing of the potential issues related to key tool parameters, including hard-to-find second-order effects.