ISMI 450 mm Program Moving to Next Stage

摘要

The Sematech 450 mm wafer transition program is moving beyond the wafer-handling effort to development of wafer processing and metrology equipment, according to Tom Jefferson, 450 mm program director at the International Sematech Manufacturing Initiative (ISMI, Austin, Texas).rnUsing polysilicon test wafers over the past two years, the ISMI Interoperability Test Bed (ITB) in Austin has developed 450 mm load ports and equipment front-end modules (EFEMs), and robotics have been developed and tested over -5 million cycles.