Samsung's Kim Claims No Limit to Scaling

摘要

The ever-optimistic Kinam Kim of Samsung Electronics stated that some people in the industry say the limit of scaling is -5 nm, to which he said, "I do not agree." He is optimistic that EUV double patterning (NA=0.25, 0.32, then 0.6) will take patterning to several nanometers in 2014. "Using this kind of technology, I believe we will print down to several nanometer." His presentation of the fundamental laws of physics (based on Boltzmann distribution and Heisenberg's uncertainty principle) predicts a limit of scaling around 1.2 nm. Kim, executive vice president and general manager of Samsung's Semiconductor R&D Center and Samsung Fellow presented at IMEC's Technology Forum in Brussels, Belgium, in June.