Spectrograph for Plasma Monitoring

摘要

The SD1024F Series of spectro-graphs for plasma process monitoring and control supports applications including process development, fault detection, troubleshooting, leak testing, wet clean recovery and endpoint detection. The SpectraView software assists with rnpeak identification using Line ID, rapid trend line and spectra viewing. The software also includes features for real-time process control. The system includes instruments with spectral coverage from 200-800 nm and from 900-1700 nm. There are different ranges of resolution and performance available.