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The modification behaviour for Si implanted PET

机译:硅注入PET的改性行为

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Polyethylene terephthalate (PET) has been modified by Si ion implantation with a dose ranging from 1 x10~(16) to 2x10~(17) ions /cm~2 using a metal vapor vacuum arc (MEVVA) source. The surface morphology was observed by atomic force microscopy (AFM). The change in the micro-structure of Si implanted PET was observed with a transmission electron microscope (TEM). It is believed that the change would improve the conductive properties and wear resistance. The electrical properties of PET have been improved via Si ion implantation. The resistivity of implanted PET decreased obviously with an increase in ion dose. When Si ion dose was 2x10~(17) cm~(-2), the resistivity of PET could be less than 7.9 Ω • m. The surface hardness and modulus increased obviously. The mechanical property of the implanted PET has been modified greatly. The hardness and modulus of Si implanted PET with a dose of 2 x 10~(17)/cm~2 are 12.5 and 2.45 times greater than those of pristine PET, respectively. The area of cutting groove for Si implanted PET is narrower and shallower than those of the unimplanted PET. So the wear resistance is greatly raised. In comparison with metal ion implantation, the improvement of mechanical properties is obvious in ion implantation into PET. Si ion beam modification mechanism of PET is discussed.
机译:聚对苯二甲酸乙二酯(PET)已通过使用金属蒸气真空电弧(MEVVA)源进行硅离子注入而改性,剂量范围为1 x10〜(16)至2x10〜(17)离子/ cm〜2。通过原子力显微镜(AFM)观察表面形态。用透射电子显微镜(TEM)观察了植入Si的PET的微观结构的变化。相信这种改变将改善导电性能和耐磨性。通过硅离子注入,PET的电性能得到了改善。注入的PET的电阻率随着离子剂量的增加而明显降低。当Si离子剂量为2x10〜(17)cm〜(-2)时,PET的电阻率可小于7.9Ω•m。表面硬度和模量明显增加。植入的PET的机械性能已大大改变。剂量为2 x 10〜(17)/ cm〜2的Si注入的PET的硬度和模量分别是原始PET的12.5倍和2.45倍。硅注入的PET的切割槽的面积比未注入的PET的切割槽的宽度窄且浅。因此,耐磨性大大提高。与金属离子注入相比,将离子注入PET的机械性能明显改善。探讨了PET的Si离子束改性机理。

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