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Semiconductor Processing Equipment

机译:半导体加工设备

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This research disclosure relates to a radiation source. In particular, it relates to a laser-produced plasma (LPP) radiation source. Such an LPP source may provide radiation to a lithographic apparatus. Photolithography is a process of transferring a pattern to a radiation-sensitive substrate by exposing the substrate to radiation having the pattern. The substrate may be a resist-coated silicon wafer. The pattern may be imparted onto a beam of radiation using a reticle. Radiation used in a lithographic apparatus may be extreme ultraviolet (EUV). EUV radiation has a wavelength in the range 4-20 nm. for example 13.5 nm. EUV lithography is used in printing integrated circuits. One known source of EUV radiation is shown schematically in Figure 1. This EUV radiation source comprises a droplet generator that is arranged to produce a stream of fuel droplets along a fuel droplet trajectory and a laser arranged to produce a laser beam that intersects this trajectory. Typically, tin is used as a fuel. The laser beam is incident on the fuel droplets and at least partially converts the droplets into a plasma at a primary focus. The plasma subsequently emits EUV radiation.
机译:该研究披露涉及一种辐射源。特别地,它涉及激光产生的等离子体(LPP)辐射源。这种LPP源可以向光刻设备提供辐射。光刻是通过将基板暴露于具有图案的辐射来将图案转移到辐射敏感衬底的过程。基板可以是抗蚀剂涂覆的硅晶片。可以使用掩模版赋予辐射束上的图案。光刻设备中使用的辐射可以是极端的紫外(EUV)。 EUV辐射的波长在4-20nm的范围内。例如13.5 nm。 EUV光刻用于印刷集成电路。在图1中示意性地示出了一种已知的EUV辐射源。该EUV辐射源包括液滴发生器,该液滴发生器布置成沿着燃料液滴轨迹产生燃料液滴流,并且激光器布置成产生与该轨迹相交的激光束。通常,锡用作燃料。激光束入射在燃料液滴上,并且至少部分地将液滴转换成主要焦点的等离子体。血浆随后发出EUV辐射。

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    《Research Disclosure》 |2021年第683期|1188-1191|共4页
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