Hydrogen after-burner

摘要

Auto-ignition burner for destroying waste hydrogen from catalytic decomposition of NH3 in GaNCat product. NH3 gas is used in the manufacture of GaN light emitting diodes. Significant proportions of this exit the process tool un-reacted and require to be destroyed. Typically this would be wet-scrubbed with sulphuric acid dosed scrubbers, though in certain teritories NH4+ aqueous discharge limits preclude this. As an alternative, catalytic reactors are now being employed to decompose the NH3 to N2 and H2. Whilst most people will happily dilute H2 to below its LFL and simply discharge it to atmosphere, some customers require it to be burned.