THE PUMPING PERFORMANCES OF THE TURBOMOLECULAE PUMP SIMULATED BY DIRECT SIMULATION MONTE CARLO METHOD

摘要

Turbomolecular pumps (TMPs) are used extensively in several highly important areas of industry and research. The performances of TMP are evaluated by maximum throughput and maximum pressure ratio. In this paper, they are investigated by DSMC method. A 3D analysis in a rotating reference frame is proposed to simulate this flow field. Considering the Coriolis and centrifugal accelerations, the equations about the molecular velocities and position are deduced. The VSS model and NTC collision schemes are used to calculate the intermolecular collisions. The diffuse reflection is employed on the molecular reflection from the surfaces of boundary. The procedures for establishment of the correct collision rate are based on the cells, while individual collision pairs are chosen from the sub-cells. The pump performances of one stage TMP under the different kinds of gas, different heights, and different blade angles are simulated and the results are analyzed. Numerical results agree well with the existing experiment data.