Electron swarm parameters in SiH/sub 4/-rare gas mixtures and collision cross sections for monosilane molecules

摘要

Previously measured drift velocities and longitudinal diffusion coefficients in SiH/sub 4/-Ar mixtures were reanalyzed, and the new vibrational excitation cross sections for monosilane molecules were obtained. Not only were the new cross sections consistent with swarm parameters, but also the ratio of their magnitudes at the resonance peak agreed with earlier measurements of the electron beam experiment. Having known the vibrational excitation cross sections, the analysis of the primary ionization coefficient measured in SiH/sub 4/-Kr mixtures led to a consistent inelastic cross section, which possibly corresponds to the total section for neutral dissociations for the molecule. It was confirmed that the derived set of the cross sections also gave good agreement with the electron swarm parameters measured in pure monosilane gas.