Ion-Implantation Modification of Surface Flashover Properties in Vacuum of Polytetrafluoroethylene

摘要

Surface modification of polytetrafluoroethylene (PTFE) is performed by nitrogen ion implantation for improving the PTFE surface flashover voltage in vacuum. In this paper, nitrogen ions are produced by an electron cyclotron resonance ion source. The properties of the samples are investigated with X-ray photoelectron spectroscopy, electrometer, microhardness tester, surface potential measurement, and surface flashover system. The Stopping and Range of Ions in Matter software is used to simulate the ion implantation. Experimental results show that the surface flashover voltage of treated samples improves remarkably and increases with the injection energy. After ion implantation, the content of fluorine in the treated samples decreases, and the content of oxygen increases. The surface conductivity increases from 1.15 × 10^{-15to 1.36 10-13S/m, the surface potential decreases faster, and the trap density and energy increase with the implantation energy. The process of electron avalanche and the accumulation of surface charges have been suppressed, thus hindering the development of flashover and improving the surface flashover voltage.}