Geometric micron-moire

摘要

A high spatial resolution and high-sensitivity geometric micron-moire method is presented. The method is based upon classical geometric moire and microscopic principle, the frequency of the specimen and reference gratings used in this method can be higher than 1000 lines/mm. By a microscopic moire system, the high-frequency gratings could be magnified to a low-frequency level, so geometric moire patterns can be formed. Experiments show that both the spatial resolution and the sensitivity can reach or exceed micron-level.