Recent Developments In Interferometry For Microsystems Metrology

摘要

Progress in microsystems technology promises a whole lot of new and innovative applications in industry and research. The emphasis of microsystems development is oriented towards the miniaturization of mechanical, electro-mechanical, optomechanical, and micro-fluidic systems [1-4]. These microsystems offer significant advantages over conventional systems, such as small form factors, highly robust construction, and low power consumption.