Experimental study on the development of a micro-drilling cycle using ultrashort laser pulses

摘要

Microholes for the production of high precision devices were obtained by ultrashort pulsed laser machining of martensitic stainless steels. A micro-drilling cycle based on the sequence of a drilling through phase, an enlargement and finishing phase is proposed in order to solve the trade-off between process time and quality of the ablated surfaces without making use of complex design of experiments. The three phases were studied taking into account the evolution of the microhole shape as a function of the main process parameters (number of passes per phase, incidence angle and radius of the beam trajectory respect to the hole's axis).