Three-dimensional shape measurement with sinusoidal phase-modulating fiber-optic interferometer fringe

摘要

A three-dimensional (3-D) shape measurement system using a fiber-optic interferometer fringe projector is presented and demonstrated. The system utilizes sinusoidal phase shifting interferometry to detect the desired phase which is improved by introducing constant scaling factors from linear phase shift interferometry algorithm, and the relationship between the modulation voltage and the phase modulation coefficient is analyzed; the system also utilizes the reflection signal to realize measurement of the disturbance and feed back to the modulated signal. Practical experiments validate the feasibility of this method. The phase accuracy is nearly 37.6 mrad and the measurement error is about 10 nm. (C) 2016 Elsevier Inc. All rights reserved.