Photodiodes for laser power monitoring and metrology introduced by Opto Diode

摘要

Opto Diode Corp. in Camarillo, Calif., is introducing the SXUV100TF135 and SXUV100TF135B photodiodes with integrated thin-film filters for electro-optical applications such as laser power monitoring, semiconductor photolithography, and metrology systems that use extreme ultraviolet light.