Novel design of a RF-MEMS tuneable capacitor based on electrostatically induced torsion

摘要

Micro-Electro-Mechanical System (MEMS) RF switches have been one of the most interesting areas for research and development in the last years. It has been shown that they have an excellent performance in the RF and microwave frequency range and a great effort has been dedicated in designing suitable geometries and structures best suited for switching application. In parallel other devices useful for the construction of complex RF circuits have been proposed and studied. Among these tuneable capacitors are of high interest for a variety of applications. In this paper we present a new electromechanical design for a tuneable capacitor with a totally different shape from usual designs. In particular we try to exploit the effect of the small in-plane force that develops during the polarization of a parallel plate capacitor with partially overlapping plates. First prototype realizations aiming at the development of the electromechanic aspects of the concept are discussed and analyzed and as the first realization showed some problems an improved design is presented.