High sensitivity temperature sensor based on a long, suspended single-walled carbon nanotube array

摘要

Considering the electron–phonon scattering mechanisms as well as the number of conductionnchannels, the long single-walled carbon nanotube (SWCNT) has larger temperature coefficient of resistivitynthan that of the short SWCNT or that of the multi-walled carbon nanotube (CNT). A tens of micrometresnlength, suspended SWCNT array-based temperature sensor was proposed, and its fabrication technique wasnpresented. The theoretical analysis and the experimental results showed that the long SWCNT array devicenhad high sensitivity and low power consumption than ordinary platinum thermal resistor. The long SWCNTnarray sensor also featured a simple and application-oriented process and was easier to use than a single CNTbasedndevice. Thus, it has the potential to be applied in high sensitivity temperatures or flow measurementsnin an ultra small scale.