Out-of-plane buckled cantilever microstructures with adjustable angular positions using thermal bimorph actuation for transducer applications

摘要

The integration of thermal bimorph actuators and buckled cantilever structures to form an out-of-plane plate with adjustable angular positions is reported. This structure could be used as a platform to build other transducers such as optical micromirrors, scanning antennas, switches or low-frequency oscillators. The electromechanical characterisation has shown that these structures can adjust their angular position by 6° when they are operated using a DC source. The thermal characterisation performed by an infrared camera showed that the heat-affected zone reaches a maximum temperature of 125°C while the rest of the structure remains unaffected by the generated heat.