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Approach for the improvement of sensitivity and sensing speed of TFET-based biosensor by using plasma formation concept

机译:利用等离子体形成概念提高基于TFET的生物传感器的灵敏度和感测速度的方法

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摘要

In this work, a new design of dual-gate source electrode (SE) dielectric-modulated tunnel field-effect transistor (TFET) biosensor with improved sensitivity and sensing speed has been presented. For this, P + (source) I (channel) N + (drain) type conventional TFETs structure is initially considered for comparison. Further to this, for the first time, an additional electrode is placed over the physically doped source region of the conventional biosensor with the negative supply voltage for extension of the cavity over the source region. The use of extra SE with negative supply voltage for the formation of cavity over the source region overcome the issues related to the formation of abrupt junction (at source/channel junction) and solubility limit of silicon material by the formation of a plasma layer of holes near to Si/HfO2interface in the source region. Moreover, the presence of extra biomolecules in the source cavity region of the proposed device further increases the concentration of plasma layer of holes near to Si/HfO2due to better coupling of SE and source region which is responsible for the improvement in sensing capability and sensing the speed of TFET biosensor. In this concern, a comparative investigation has been performed.
机译:在这项工作中,提出了一种新设计的双栅源电极(SE)介电调制隧道场效应晶体管(TFET)生物传感器,具有更高的灵敏度和感测速度。为此,首先考虑使用P +(源)I(沟道)N +(漏极)型常规TFET结构进行比较。除此之外,这是第一次在常规生物传感器的物理掺杂源区上方放置一个附加电极,负电极电压为负,用于在源区上方扩展空腔。使用具有负电源电压的额外SE来在源极区域上方形成腔体,克服了与形成突然结(在源极/通道结处)和硅材料的溶解度限制有关的问题,因为形成了空穴等离子层接近Si / HfO n 2 n接口。而且,在所提出的装置的源腔区域中存在额外的生物分子,进一步增加了靠近Si / HfO的空穴的血浆层浓度 n 2 nd,因为SE和源区域之间的耦合更好,这是导致改进的原因在检测能力和检测TFET生物传感器的速度方面。考虑到这一点,已经进行了比较研究。

著录项

  • 来源
    《Micro & nano letters》 |2018年第12期|1728-1733|共6页
  • 作者单位

    Nanoelectronics and VLSI Lab, Electronics and Communication Engineering Discipline, Indian Institute of Information Technology, India;

    Nanoelectronics and VLSI Lab, Electronics and Communication Engineering Discipline, Indian Institute of Information Technology, India;

    Nanoelectronics and VLSI Lab, Electronics and Communication Engineering Discipline, Indian Institute of Information Technology, India;

    Nanoelectronics and VLSI Lab, Electronics and Communication Engineering Discipline, Indian Institute of Information Technology, India;

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  • 原文格式 PDF
  • 正文语种 eng
  • 中图分类
  • 关键词

    field effect transistors; silicon; elemental semiconductors; biosensors; tunnel transistors; semiconductor device models;

    机译:场效应晶体管;硅;元素半导体;生物传感器;隧道晶体管;半导体器件模型;

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