Simultaneous measurement of three orthogonal components of displacement by electronic speckle-pattern interferometry and the fourier transform method

摘要

The measurement of three-dimensional displacement by electronic speckle-pattern interferometry with three object beams and one reference beam is presented. Multiple interference fringes corresponding to different sensitivity vectors are recorded in a single interferogram and separated by means of the Fourier transform method to give three components of displacement. The relationship between theratio of the speckle size to the pixel size of a TV camera and the measurement error is investigated experimentally and compared with the research of others.