Taguchi method prediction of effect of processing parameters on nanoparticle size in chemical vapor condensation process

摘要

The Taguchi method has been applied to investigate the effect of various operating parameters such as decomposition temperature, bubbler temperature, carrier gas flow rate, precursor flow rate and pressure on particle size in the Chemical Vapor Condensation process. Also, the effect and contribution of each pertinent parameter on particle size and the interaction among them was determined by Taguchi analysis. It was observed that the decomposition temperature was the most significant process parameter affecting the particle size. Also, the predicted nanoparticle size was in good agreement with that found in the experiment.