An Infrared Gas Microflowmeter

摘要

The design of an infrared gas microflowmeter based on measurements of flow rate performed from the radiancy of the surface of a heat-sensitive element, or spiral heated to 1270 K, is described. The maximum output signal of the flowmeter is 30 V, the sensitivity 4.5 V/(mg center dot sec(-1)), and relative error 0.2-0.5%.