In situ analysis of the thermal behavior in the Zr-based multi-component metallic thin film by pulsed laser deposition combined with UHV-laser microscope system

摘要

The thermal behavior of the Zr-based multi-component metallic thin films was investigated under an atmospheric N_2 condition by using pulsed laser deposition (PLD)-combined with in situ laser microscope (LM) system. The Zr-based multi-component metallic thin films were prepared in amorphous by PLD with a stoichiometric target of the Zr-based metallic glass. By comprehensive study with ex situ analyses such as XRD, SEM and EPMA techniques, it was found that the gradual formation of Zr_2Ni alloy particles occurred above 500 ℃, and subsequently the inhomogeneous contrast, probably owing to the partial formation of ZrO_2 on the film surface appeared at high temperature.