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Oxidation behaviour of stainless steel-Al coatings produced by co-sputtering and reactive sputtering

机译:共溅射和反应溅射制备的不锈钢-铝涂层的氧化行为

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摘要

Unbalanced magnetron sputter deposition (UMSD) was employed to produce thin alloy coatings for high temperature application. The coatings consist of 310S stainless steel and Al. Two methods have been used to deposit the coatings. One is the conventional co-sputtering with 310S steel and Al targets in argon, and the other is co-sputtering with oxygen introduced into the system, in which a part of Al was oxidised to alumina. SEM and XRD results showed different microstructures of the coatings obtained by using these two methods, resulting in different oxidation behaviour. While these two coatings formed protective oxide scales during oxidation, breakaway oxidation took place on the uncoated stainless steel samples.
机译:不平衡磁控溅射沉积(UMSD)用于生产高温应用的薄合金涂层。涂层由310S不锈钢和Al组成。已经使用两种方法来沉积涂层。一种是与310S钢和Al靶材在氩气中进行常规共溅射,另一种是与引入系统中的氧气进行共溅射,其中一部分Al被氧化为氧化铝。 SEM和XRD结果表明,使用这两种方法获得的涂层具有不同的微观结构,导致不同的氧化行为。虽然这两个涂层在氧化过程中形成保护性氧化皮,但未镀覆的不锈钢样品发生了分离氧化。

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