Zinc oxide films formed by oxidation of zinc under low partial pressure of oxygen

摘要

Zinc oxide (ZnO) thin films were prepared through thermal oxidation of metallic zinc samples under various oxygen partial pressures at 330 and 380℃. The surface morphologies of the oxide films formed were characterised with high-resolution scanning electron microscopy (HR-SEM). These oxide films consist of nano-sized whisker and cluster-like grains. The photoluminescence (PL) properties of ZnO films were also analysed. Near-band edge ultra-violet (UV) emission was observed, as well as green emission. It was found that the UV to green emission ratio had clear relation with the oxygen partial pressure during oxidation.