Solution of emulsifiable oil and hydrogen peroxide for chemical-mechanical polishing of Ti alloy: A green approach

摘要

A simple solution mixture comprising an emulsifiable oil and hydrogen peroxide was used for chemical-mechanical polishing (CMP) of Ti alloy with a composition of Ti-6.3Al-1.9V-2.9Zr-2.1Mo. The solution was found to be an effective polishing agent resulting in mirror-finish of the alloy surface with a considerable reduction in average surface roughness (from Ra～0.1 to 0.04 μm) within 10 min of CMP. Further the root-mean-square roughness and arithmetic mean deviation of roughness of polished surface were found to be 1.12 nm and 0.96 nm, respectively. The chemical mixture used in the present study is greener and safer compared to the previously used chemicals for polishing of Ti alloys. Further the solution is devoid of any abrasive particles. On account of these advantages, the new polishing solution is expected to find use in mirror-polishing of Ti alloys for aerospace and biomedical applications.