Medium ion energy synthesis of hard elastic fullerene-like hydrogenated carbon film with ultra-low friction and wear in humid air

摘要

In this article, we prepared the fullerene-like hydrogenated carbon film by using the chemical vapor deposition (CVD) technique with pure CH4 and low ion energy supply (500 V). The film exhibits high hardness (similar to 16.8 GPa), good elasticity recovery (similar to 82%) and ultra-low friction (similar to 0.023) and wear in humid air. Meanwhile, compared with previous deposition methods, this synthesis method offers advantages such as simpler operation, easier controlling, and lower cost. (C) 2014 Elsevier B.V. All rights reserved.